A way of creating patterns on a siliconAn element (number 14 in the periodic table) that can be a semiconductor, making it the material of preference for circuits and micro-mechanical devices. waferIn the context of making circuits, sensors, and actuators, a thin, round slice of pure silicon. Multiple devices will be made on it; it will then be sliced up to separate the individual chips. for selective depositionA means by which materials can be added to a silicon wafer. or etchingA means by which materials can be removed from a silicon wafer.. You can think of it as taking a picture of the pattern and having it show up on the wafer. In the industry, photolithography is often abbreviated as lithography.