Actuating

[From the last episode: We looked at the many steps required to dig a swimming pool using only MEMS-like techniques.] Before we take a look at some specific kinds of sensors, let’s talk a bit more about MEMS processing, since it’s incredibly versatile. There are a couple things that are […]

[From the last episode: We looked at the normal way to build a pool, and then looked generically at what’s different when you use a MEMS approach.] What follows echoes (but is not identical to) a piece I did for EE Journal way back in 2011. Because that audience is […]

[From the last episode: MEMS technology has been critical for enabling micro-scale sensors and actuators.] A first warning: this post and the next one may tax your imagination. So buckle up! We’ve seen the basic processing steps needed to make things on silicon: deposition, etching, and litho. When these are […]

[From the last episode: The big change in sensors is scale. We tend to refer to scale using “macro” for big or metric prefixes like “micro” and “nano.”] Now that we have some semiconductor basics behind us, as well as a sense of scale, let’s look at one of the […]

[From the last episode: Photolithography allows us to be selective about where we add material and where we remove it.] Before we dive into how sensors and actuators are made, here’s an important question: Sensors aren’t new, so why all the hullabaloo now? Old and Bulky Don’t Cut It OK, […]